By Jing Cheng
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Bonding techniques for microsensors. In Micromachining and Micropackaging of Transducers. G. Fleming, eds. Elsevier Science Publishers, Amsterdam, pp. 41–61. Madou M. 1997. Fundamentals of Microfabrication. CRC Press, Boca Raton, Florida. , and Glang R. 1970. Handbook of Thin Film Technology. McGraw-Hill, New York. J. 1978. Plasma assisted etching techniques for pattern delineation. In Thin Film Processes. Kern, eds. Academic Press, San Diego, pp. 497–556. , and Esteve J. 1993. TMAH/IPA anisotropic etching characteristics.
Zhou and J. Broughton of AMC. Design courtesy of T Woudenberg of PE Biosystems. Microfabrication processes for silicon and glass chips 29 Figure 4. Comb filter etched in (110) silicon using KOH. 4 Si3N4 etch, high etch water selectivity to SiO2 Low etch selectivity to (111) plane aEtch rates adapted from Petersen (1982), Tabata et al. (1992), Reisman et al. (1979), Seidel et al. 2. Glass Etching The glass substrates of interest contain a significant amount of SiO2, with the rest of the constituents being various metal oxides.
Straka. 1996. Micromachined silicon structures for modelling polymer matrix controlled release systems. J. Contr. Rel. 42:15–24. Esashi. 1995. Bonding and assembling methods for realizing a µ-TAS. In Micro Total Analytical Systems. Bergveld, eds. Kluwer Academic Publishers, Dordrecht, pp. 165–179. Messner. 1992. Two-dimensional protein crystals as patterning elements in molecular nanotechnology. AIP Conf. Proc. 262:167–177. Karube. 1994. Multisample analysis using an array of microreactors for an alternating-current field-enhanced latex immunoassay.
Biochip Technology by Jing Cheng